M6

Time-of-Flight Secondary Ion Mass Spectrometer with advanced ion beam technology. Features high lateral resolution. Offers versatile applications in 3D chemical imaging, depth profiling, and nanomaterial analysis.

• Status: Active
• Country: Germany
• Isotopic: Yes
• Elemental: Yes
• Analyte Type / Target Of Analysis: Most of elements, isotopes, and molecular species
• Measurable Isotopes/Elements: Covers isotopes across the periodic table, organic and inorganic species
• Analyzer Type
  : Time-of-Flight MS
• Ion Source Type: Nanoprobe 50 bismuth cluster ion source, Cs+ source, O2+ source
• Inlet Types: Ultra-high vacuum chamber with automated sample handling
• High Resolution
  : Yes
• Mass Resolution/ Mass Resolving Power
  : >30,000
• Sensitivity
  : Up to three times higher sensitivity due to enhanced extraction optics
• Dynamic Range
  : 7 orders of magnitude
• Detection Limits
  : Sub-ppm levels
• Detector Type
  : Microchannel plate detector with phosphor screen and time-to-digital converter
• Primary Beam [SIMS]
  : Bi3+, Cs+, O2+, Gas Cluster Ion Source (GCIB)
• Voltage
  : Up to 30 kV
• Spatial Resolution
  : <50 nm
• Depth Profile
  : Depth resolution <1 nm
• Beam Energy
  : Adjustable up to 30 keV
• Camera
  : High-resolution CCD camera for sample visualization
• Geometry Type
  : Single-focusing reflectron TOF geometry
• Focusing Type
  : Electrostatic focusing
• Cooling System
  : Closed-loop liquid nitrogen cooling system
• Vacuum System
  : Ultra-high vacuum with dry pumps
• Gas Supply: Argon, oxygen, cesium, and inert gases