JEM-2200FS

200 kV FEG TEM with in-column energy filter, elemental and chemical analysis with zero-loss imaging

• Status: Active
• Country: Japan
• Analyte Type / Target Of Analysis: Morphology and microstructure
• Vibration / Magnetic / Noise Tolerance
  : Passive air mount standard, active air mount optional
• Electron Gun Type
  : Extreme FEG
• Standard Detectors [EM]
  : CCD camera, BF/DF detectors
• Optional Detectors [EM]: EDS, STEM BF/HAADF, U-HAADF, STEM image observation system
• Cryo
  : Optional
• STEM
  : Yes
• STEM Parameters: STEM BF/HAADF detectors, U-HAADF, STEM Cs corrector
• Additional Analytical Capabilities
  : EDS, EELS, energy filtering, elemental mapping, chemical-state mapping, 3D tomography
• Electron Optics
  : Four-stage intermediate lenses, two-stage projector lenses, omega-type energy filter
• Resolution [EM]
  : Lattice: 0.1–0.14 nm; Point-to-point: 0.19–0.31 nm
• Optical Column
  : Objective mini lens, omega-type in-column energy filter
• Electron Beam Resolution
  : STEM HAADF image: 0.136 nm
• Beam Current
  : Probe current 0.5 nA or more at 1 nm probe
• Image Parameters
  : Zero-loss filtering, energy-filtered imaging, CBED, HAADF, elemental mapping
• Magnification
  : MAG mode: ×2,000 to ×1,500,000; SA MAG mode: ×10,000 to ×800,000
• Camera Details
  : High-precision digital CCD camera
• Stage Parameters
  : Piezo-controlled goniometer, X/Y ±25° to ±80° tilt depending on configuration
• Holder Types: Specimen tilting holder, Beryllium tilting, heating, cooling holders
• Aberration Correction Type
  : Optional TEM and STEM Cs correctors co-developed with CEOS
• Cooling System
  : Flow rate 7.5 L/min, temperature 15–20 °C, pressure 0.2–0.3 MPa
• Vacuum System
  : Dry pump system, TMP pump, anti-contamination device
• Power Specifications: 240/220/200 V, 10 kVA
• Environmental Specifications: Temperature 15–25 °C, fluctuation ≤1 °C/h, humidity ≤60%
• Physical Specifications: Floor space 5,000×5,400 mm, ceiling height ≥3,200 mm, entrance ≥1,000×2,200 mm