ION-TOF SIMS 5

Retired Time-of-Flight Secondary Ion Mass Spectromete for ultra-high-resolution surface analysis. Capable of detailed 3D imaging, depth profiling, and molecular/elemental analysis of surfaces with high spatial and depth resolutions.

• Status: Inactive
• Country: Germany
• Isotopic: Yes
• Elemental: Yes
• Analyte Type / Target Of Analysis: Most of elements, isotopes, and molecular species
• Measurable Isotopes/Elements: Isotopes of elements across the periodic table
• Analyzer Type
  : Time-of-Flight MS
• Ion Source Type: Liquid Metal Ion Gun (Bi+), dual ion sources (Cs+ and O2+)
• Inlet Types: Ultra-high vacuum chamber with motorized sample stages
• High Resolution
  : Yes
• Mass Resolution/ Mass Resolving Power
  : R>10,000
• Sensitivity
  : High sensitivity for molecular and elemental analysis at ppm/ppb levels
• Detection Limits
  : Down to 107 atoms/cm
• Detector Type
  : Microchannel plate detector with phosphor screen and time-to-digital converter
• Possible Amplifiers
  : Bi+, Cs+, O2+, and C60+
• Primary Beam [SIMS]
  : Primary beam energy up to 30 keV
• Voltage
  : Optional post-ionization available
• Spatial Resolution
  : <60 nm
• Depth Profile
  : Depth resolution better than 1 nm
• Beam Energy
  : Bi+: 25 keV; Cs+/O2+: up to 2 keV
• Camera
  : High-resolution CCD camera for sample navigation
• Geometry Type
  : Single-focusing reflectron energy compensating TOF geometry
• Focusing Type
  : Electrostatic focusing for high resolution
• Gas Supply: Cs, O2, and inert gases for sputtering
• Power Specifications: 210–230 V, 50/60 Hz; Max power: 3.5 kW
• Environmental Specifications: Temperature: 18–22°C; Humidity: 20–80%
• Physical Specifications: Main unit: 930 × 1820 × 2050 mm; Weight: 900 kg; Electronics rack: 1650 × 1730 × 757 mm; Weight: 300 kg