AutoSIMS

Fully automated, programmable SIMS system for depth profiling and contamination analysis.

• Status: Active
• Country: United Kingdom of Great Britain and Northern Ireland
• Isotopic: Yes
• Elemental: Yes
• Analyte Type / Target Of Analysis: Most of elements, isotopes, and molecular species
• Measurable Isotopes/Elements: B, P, As, Si, Mg, Be, H, O, etc.
• Analyzer Type
  : Quadrupole MS (single)
• Ion Source Type: IG5C Cs⁺ and IG20 O₂⁺ ion guns
• Inlet Types: Direct solid sample loading with rotary carousel
• Sensitivity
  : ~10¹⁷ atoms/cm³ (Si in GaAs); ppb–ppm range
• Dynamic Range
  : 10⁶
• Detection Limits
  : Down to 2×10¹⁶ atoms/cm³ for light elements (e.g., B, Be)
• Precision
  : Typically <1%
• Primary Beam [SIMS]
  : Cs⁺ and O₂⁺ (1–5 keV)
• Voltage
  : 1–5 keV
• Spatial Resolution
  : ~50–80 µm (limited by beam spot and raster size)
• Vacuum System
  : UHV, differential pumping, dry pumps, bakeable
• Power Specifications: 2500 W, single phase