AURA 200

Advanced compact SEM. Designed to minimize EMI and vibration. 2-stage lens system.

• Status: Active
• Country: Korea (Republic of)
• Analyte Type / Target Of Analysis: Morphology and microstructure
• Vibration / Magnetic / Noise Tolerance
  : 3μm/sec @ 5–10Hz; EMI compliant
• Electron Gun Type
  : Thermionic source (W)
• Standard Detectors [EM]
  : SE
• Additional Analytical Capabilities
  : AOI Tool
• Electron Optics
  : 2-Stage Lens (CL & OL)
• Resolution [EM]
  : < 7nm @ 20KeV
• Image Parameters
  : Area Mode(640x480), Photo(3840x2880)
• Magnification
  : 100,000X + Digital Zoom 2X, 4X
• Stage Parameters
  : X,Y(40mm) / Z(530mm) / Rotation(360°) / Tilt(045°)
• Aberration Correction Type
  : Aberration reduction optic design
• Power Specifications: 220–230V AC, 5KW, 50/60Hz
• Environmental Specifications: 22±2°C, Humidity < 70%
• Physical Specifications: 360(W) × 440(D) × 580(H) mm