Apreo ChemiSEM

FEG-SEM with ChemiSEM and EBSD; Trinity in-column detection; Automated high-res imaging

• Status: Active
• Country: United States of America
• Analyte Type / Target Of Analysis: Morphology and microstructure
• Vibration / Magnetic / Noise Tolerance
  : Site survey required; vibration table optional
• Electron Gun Type
  : Schottky FEG
• Standard Detectors [EM]
  : Trinity T1, T2, ETD, IR, Nav-Cam
• Optional Detectors [EM]: DBS, DBS-GAD, STEM 3+, EBSD (TruePix), CL
• Cryo
  : Optional
• STEM
  : Optional
• STEM Parameters: BF, DF, HADF, HAADF
• Additional Analytical Capabilities
  : EDS, EBSD, WDS, Raman, CL
• Electron Optics
  : Schottky FEG, compound lens, 60° geometry, SmartAlign
• Resolution [EM]
  : 0.7 nm at 30 kV; 0.9 nm at 15 kV; 1.2 nm at 1 kV
• Optical Column
  : Compound electrostatic + magnetic + immersion lens
• Electron Beam Resolution
  : 0.7 nm at 30 kV (SE); 0.8 nm at 1 kV (BD)
• Beam Current
  : 1 pA – 50 nA (400 nA optional)
• Image Parameters
  : 25 ns – 25 ms; up to 6144×4096 px
• Chamber
  : 340 mm width, 12 ports
• Camera Details
  : IR-CCD; Nav-Cam optical camera
• Stage Parameters
  : XY: 110×110 mm; Z: 65 mm; Tilt: –15°/+90°; 500 g / 5 kg max
• Holder Types: 18-stub multipurpose, row-bar, wafer/custom
• Sample Size: 122 mm diameter
• Cooling System
  : Optional CryoCleaner; system chiller
• Vacuum System
  : Oil-free; TMP (240 l/s); ≤3.5 min evac
• Power Specifications: 100–240 V; <3.0 kVA
• Environmental Specifications: 20°C ±3°C; RH <80%; <100 nT fields
• Physical Specifications: 980 kg column console