Apreo 2 SEM

High-res FEG SEM with SmartAlign and ChemiSEM; Sub-nanometer imaging; Suitable for versatile research labs

• Status: Active
• Country: United States of America
• Analyte Type / Target Of Analysis: Morphology and microstructure
• Vibration / Magnetic / Noise Tolerance
  : Stray AC magnetic fields <40 nT async, <100 nT sync
• Electron Gun Type
  : Schottky FEG
• Standard Detectors [EM]
  : Trinity detection: T1, T2, ETD, DBS, IR, Nav-Cam
• Optional Detectors [EM]: STEM 3+, DBS, Low-vacuum SE, DBS-GAD
• Cryo
  : Optional
• STEM
  : Optional
• STEM Parameters: STEM 3+ detector (BF, DF, HADF, HAADF)
• Additional Analytical Capabilities
  : EDS, EBSD, WDS, CL, Raman
• Electron Optics
  : Schottky FEG, compound lens (electrostatic + immersion), SmartAlign, through-the-lens differential pumping
• Resolution [EM]
  : 0.5 nm at 15 kV (compound lens); 0.8 nm at 1 kV (BD); 1.2 nm at 200 V (BD)
• Optical Column
  : Field emission SEM column
• Electron Beam Resolution
  : 0.5 nm at 15 kV (BD); 0.9 nm at 1 kV; 1.2 nm at 200 V (BD)
• Beam Current
  : 1 pA – 50 nA (400 nA optional config)
• Image Parameters
  : 25 ns – 25 ms/pixel; up to 6144×4096 px
• Chamber
  : 340 mm width; 12 ports; 10 mm WD; EDS take-off 35°
• Camera Details
  : IR camera, Nav-Cam Camera
• Stage Parameters
  : XY: 110×110 mm; Z: 65 mm; Tilt: -15°/+90°; Up to 5 kg at 0° tilt
• Holder Types: 18 stubs; 3 pre-tilted; STEM grids; wafer/custom
• Sample Size: 122 mm diameter
• Cooling System
  : System chiller
• Vacuum System
  : Oil-free; 240 l/s TMP; Low-vac: 10–500 Pa; HiVac: <6.3×10⁻⁶ mbar
• Power Specifications: 100–240 V; <3.0 kVA
• Environmental Specifications: 20°C ±3°C; RH <80%; magnetic field & vibration specs
• Physical Specifications: Console: 980 kg