Fully automated Ga FIB-SEM for routine TEM prep, nanoscale prototyping, and 3D materials analysis with BrightBeam SEM and Orage FIB
Specifications
- Category: Microscopy and Imaging
- Techniques: SEM, FIB
- Manufacturer: TESCAN
- Country: Czechia
- Available: Active
Specifications
Fully automated Ga FIB-SEM for routine TEM prep, nanoscale prototyping, and 3D materials analysis with BrightBeam SEM and Orage FIB
- Status: Active
- Country: Czechia
- Techniques: SEM, FIB
- Analyte Type / Target Of Analysis: Morphology and microstructure
- Electron Gun Type: Schottky FEG
- STEM: Yes
- STEM Parameters: STEM image overlay, grain orientation, nanomanipulator-supported sample orientation
- Additional Analytical Capabilities: EDS, STEM, 3D ToF-SIMS tomography, FEBID/FIBID, prototyping
- Electron Optics: BrightBeam Field-Free UHR SEM column with Orage Ga FIB column
- Optical Column: Field-free analytical SEM optics; precise beam placement with Orage FIB column
- Beam Current: Up to 100 nA with Orage FIB column
- Image Parameters: STEM overlay with grain orientation mapping, high-quality imaging during prep
- Chamber: Integrated FIB-SEM with multi-specimen prep and TEM AutoPrep Pro
- Stage Parameters: Automated multi-site TEM sample prep using TEM AutoPrep Pro
- Holder Types: TEM lift-out, inverted/planar orientation sample support
- Sample Size: Multi-site TEM lamella; FIB cut of ~50 µm particle shown
- Vacuum System: High vacuum system integrated with SEM and FIB
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