Amber

Field-free UHR-SEM and Ga FIB for high-precision microanalysis and sample prep

• Status: Active
• Country: Czechia
• Techniques: FIB, SEM
• Analyte Type / Target Of Analysis: Morphology and microstructure
• Vibration / Magnetic / Noise Tolerance
  : <10 µm/s <30 Hz; <20 µm/s >30 Hz; <60 dBC; <300 nT sync field
• Electron Gun Type
  : Schottky FEG
• Standard Detectors [EM]
  : In-column SE and BSE, Everhart-Thornley SE, chamber IR camera
• Optional Detectors [EM]: R-STEM, LE-BSE, Rainbow CL, TOF-SIMS, Raman, EBSD, WDS, EDS
• Cryo
  : Optional
• STEM
  : Yes
• STEM Parameters: BF, DF, HAADF sectors, holders for 8 grids
• Additional Analytical Capabilities
  : EDS, EBSD, WDS, Raman, TOF-SIMS, 3D tomography, DrawBeam nanopatterning
• Electron Optics
  : BrightBeam UHR-SEM with electrostatic-magnetic lens, field-free optics
• Resolution [EM]
  : 0.8 nm @ 30 keV STEM; 0.9 nm @ 15 keV SE; 1.3–1.5 nm @ 1 keV
• Optical Column
  : BrightBeam field-free with electromagnetic beam aperture control
• Electron Beam Resolution
  : 0.8–1.5 nm depending on mode and voltage
• Beam Current
  : 2 pA – 400 nA
• Image Parameters
  : 16k × 16k, 8-channel, color mapping, live overlay, image stitching
• Magnification
  : Max field of view: 7 mm @ WD = 6 mm; 50 mm @ max WD
• Chamber
  : 340 mm W × 315 mm D, 20+ ports, active suspension
• Camera Details
  : Dual IR cameras (optional), plasma cleaner, up to 32” QHD monitor
• Stage Parameters
  : 5-axis compucentric; X/Y: 130 mm, Z: 90 mm, Tilt: –60° to +90°
• Holder Types: STEM holders (up to 8 grids), lamella, mechanical tests, EBSD cradle
• Sample Size: Max height 90 mm (132 mm w/o rotation), large wafer extensions
• Cooling System
  : Optional (water-cooled BSE detectors)
• Vacuum System
  : High vacuum <9×10⁻³ Pa; low vacuum 7–500 Pa; all oil-free
• Power Specifications: 230 V ±10%, 50 Hz, 2300 VA, 2 kW UPS included
• Environmental Specifications: 17–24 °C, <65% RH, <10 µm/s vibration, <60 dBC, magnetic <300 nT
• Physical Specifications: Footprint: minimum 4.2 × 3.1 m; door width ≥1.0 m