Allalin

Hybridized SEM-spectroscopic platform; enables SEM, CL, PL, Pump & Probe, EBIC/EBAC/RCI; designed for static and dynamic modes

• Status: Active
• Country: Switzerland
• Analyte Type / Target Of Analysis: Morphology and microstructure
• Electron Gun Type
  : Schottky FEG
• Standard Detectors [EM]
  : PMT, UV-Visible CCD camera, InGaAs NIR detector
• Optional Detectors [EM]: TCSPC, streak camera, EBIC/EBAC, additional spectrometers, nanoprobes
• Cryo
  : Optional
• Additional Analytical Capabilities
  : CL, TRCL, PL, Raman, EBIC/EBAC/RCI, nanoprobes, ultrafast spectroscopy, hyperspectral imaging
• Electron Optics
  : Achromatic reflective objective; integrated SEM and light microscope with matched focal planes
• Resolution [EM]
  : Electron spot size: down to 3 nm @ 10 kV
• Optical Column
  : Achromatic high NA objective (NA = 0.71, f/0.5)
• Electron Beam Resolution
  : 3 nm @ 10 kV
• Beam Current
  : 30 pA to 100 nA
• Image Parameters
  : SEM image + hyperspectral/panchromatic map; pixel time: <10 ps (TRCL); up to 4 detectors/system
• Chamber
  : High-vacuum stainless steel (10⁻⁷ mbar)
• Camera Details
  : High-speed UV-Vis CCD, InGaAs NIR camera, PMT; optional streak, TCSPC
• Stage Parameters
  : 6-DOF nanopositioning stage; 25 mm XY, 3 mm Z, ±3° tilt, ±10° rotation; increment 1 nm
• Holder Types: Nanostage for 1” sample; wafer stage for 150 mm wafers
• Sample Size: Up to 50 mm diameter, 1.5 mm thick (nanostage); up to 150 mm wafer (wafer stage)
• Aberration Correction Type
  : Achromatic reflective optics; high NA lens (0.71) for optimized collection
• Cooling System
  : Optional cryostage (10 K)
• Vacuum System
  : High vacuum (10⁻⁷ mbar), loadlock for sample entry