Fully automated SIMS for high-volume semiconductor manufacturing.
Specifications
- Category: Inorganic and Isotopic Mass Spectrometry
- Technique: SIMS
- Manufacturer: CAMECA
- Country: France
- Available: Active
Specifications
Fully automated SIMS for high-volume semiconductor manufacturing.
- Status: Active
- Country: France
- Isotopic: Yes
- Elemental: Yes
- Analyte Type / Target Of Analysis: Most of elements, isotopes, and molecular species
- Analyzer Type: Magnetic Sector MS
- High Resolution: Yes
- Dynamic Range: Up to 5 decades
- Detection Limits: ≤ 10e14 atom/cm3
- Precision: < 1%
- Spatial Resolution: < 1 nm/decade
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