AIS2300C

High magnification SEM. Wide FOV and ultra pixel resolution. Designed for automation and large samples.

• Status: Active
• Country: Korea (Republic of)
• Analyte Type / Target Of Analysis: Morphology and microstructure
• Vibration / Magnetic / Noise Tolerance
  : 3μm/sec @ 5–10Hz; EMI compliant
• Electron Gun Type
  : Thermionic source (W)
• Standard Detectors [EM]
  : ET-Type SE Detector (SE-BSE mode)
• Optional Detectors [EM]: BSE, CCD, TSEM
• STEM
  : Optional
• Additional Analytical Capabilities
  : Particle Counter, Blob Analysis, 3D-View, AOI, Histogram
• Electron Optics
  : Electromagnetic Lens System
• Resolution [EM]
  : 3.0 nm @ 30kV SE, 4.0 nm BSE
• Image Parameters
  : Area Mode(640×480), up to 8192×6144
• Magnification
  : 10× – 1,000,000×
• Chamber
  : Optional large stage & chamber
• Camera Details
  : Optional CCD
• Stage Parameters
  : X/Y/Z: 60/70/65 mm; Tilt: -20° to 60° (max. 90°); Rotation: 360° Endless
• Vacuum System
  : Rotary + Turbo Pump; High vacuum; Low vacuum (optional)
• Power Specifications: 220–230V AC, 5KW, 50/60Hz
• Environmental Specifications: 22±2°C, Humidity < 70%