AIS2000C

Compact Normal SEM. Full automation and wide FOV. High compatibility with analysis tools.

• Status: Active
• Country: Korea (Republic of)
• Analyte Type / Target Of Analysis: Morphology and microstructure
• Vibration / Magnetic / Noise Tolerance
  : 3μm/sec @ 5–10Hz; EMI compliant
• Electron Gun Type
  : Thermionic source (W)
• Standard Detectors [EM]
  : ET-Type SE Detector
• Optional Detectors [EM]: EDS, BSE, TSEM
• STEM
  : Optional
• Additional Analytical Capabilities
  : EDS, BSE, TSEM, 3D Reconstruction S/W
• Electron Optics
  : Electromagnetic Lens
• Resolution [EM]
  : 3.0 nm @ 20/30kV SE
• Image Parameters
  : Up to 8192x6144
• Magnification
  : 10X – 300,000X + Zoom 2X, 4X, 8X
• Stage Parameters
  : X/Y/Z 40mm; Tilt 0–60°; Rotation 360° Endless
• Vacuum System
  : Rotary Pump + Turbo Pump
• Power Specifications: 220–230V AC, 5KW, 50/60Hz
• Environmental Specifications: 22±2°C, Humidity < 70%
• Physical Specifications: 388(W) × 600(D) × 638(H) mm