AA8000

Multi-purpose SEM. Fully automated, high-performance, compact design. Fast scan speed, pixel resolution, and noise-free image acquisition.

• Status: Active
• Country: United States of America
• Analyte Type / Target Of Analysis: Morphology and microstructure
• Electron Gun Type
  : Thermionic source (W)
• Standard Detectors [EM]
  : Bar Type SE Detector (SE-BSE conversion mode without BSE detector)
• Optional Detectors [EM]: BSE, EDS, WDS, EBSD, CCD, manipulator
• Additional Analytical Capabilities
  : EDS, WDS, EBSD, 3D data view, particle counter, Excel data export
• Electron Optics
  : Dual field objective lens for spherical aberration reduction; upgraded magnetic lens (CL/OL)
• Resolution [EM]
  : 3.0 nm @ 30 kV SE / 4.0 nm @ BSE
• Optical Column
  : Electromagnetic condenser (2 stages), objective (1 stage), 8-pole stigmator
• Electron Beam Resolution
  : 3.0 nm / 4.0 nm
• Image Parameters
  : Search (640×480) >30 fps, Inspection (1280×960) 30 fps, Photo (4096×4096) 2 fps
• Magnification
  : 10 – 1,000,000X
• Chamber
  : 50 × 60 × 57 mm, supports multiple detectors
• Stage Parameters
  : X/Y/Z = 60/70/65 mm, Tilt: –20° to +60° (Max 90°), Rotation = 360°, Motorized X,Y,R (standard); full motorization optional
• Aberration Correction Type
  : Dual field objective lens, upgraded lens design for spherical aberration reduction
• Vacuum System
  : Rotary Pump + Diffusion or Turbo Pump; Full automation with safety system