AA6000 mini

Desktop multi-purpose SEM. High performance in all SEM modes & particle counting. Easy operation in a multi-user environment.

• Status: Active
• Country: United States of America
• Analyte Type / Target Of Analysis: Morphology and microstructure
• Electron Gun Type
  : Thermionic source (W)
• Standard Detectors [EM]
  : High Sensitivity SE Detector
• Optional Detectors [EM]: EDS, BSE, etc.
• Additional Analytical Capabilities
  : Particle counter (Blob Analysis), measurement tools, filters, AOI, tiling
• Resolution [EM]
  : 5 nm @ 30 kV SE
• Electron Beam Resolution
  : 5 nm
• Beam Current
  : 1 pA – 8 µA
• Image Parameters
  : Area (320×240), Inspection (640×480), Photo (1280×960 to 5120×3840, option up to 8192×6144)
• Magnification
  : 10X – 150,000X (optional 200,000X), Digital Zoom ×2/×4/×8
• Camera Details
  : 22” LCD display
• Stage Parameters
  : 5-axis: X/Y/Z = 40 mm, Rotation = 360°; Tilt 0–90° optional; stage motorization optional
• Vacuum System
  : Rotary + Turbo Pump; Full automation/manual mode; Pirani + Penning Gauge